蚀刻剂/金属的匹配性表
| Al | Au | Cr | Cu | Ni | Si | Si3N4 | SiO2 | Ti | W | GaAs | Ta/TaN |
铝A | Etch | Ok | Etch | Etch | Etch | Surf ox | Slight | Ok | Ok | Ok | Etch | Surf ox |
铝D | Etch | Ok | Slight | Ok | Ok | Ok | Slight | Ok | Ok | Ok | Ok | Ok |
铬蚀刻剂1020 | Etch | Ok | Etch | Etch | Etch | Surf ox | Ok | Ok | Ok | Ok | Etch | Surf ox |
铬蚀刻剂1020 CRE-473 | Etch | Ok | Etch | Ok | Slight | Ok | Ok | Ok | Etch | Ok | Etch | Ok |
铬蚀刻剂TFD | Etch | Ok | Etch | Etch | Etch | Surf ox | Ok | Ok | Ok | Ok | Etch | Surf ox |
铜蚀刻剂100 | Etch | Ok | Slight | Etch | Etch | Ok | Ok | Ok | Slight | Ok | Etch | Ok |
铜蚀刻剂200 | Etch | Ok | Slight | Etch | Etch | Ok | Ok | Ok | Slight | Ok | Etch | Ok |
铜蚀刻剂APS-100 | Ok | Ok | Ok | Etch | Slight | Ok | Ok | Ok | Ok | Ok | | Ok |
GE-8110 | Etch | Etch | Ok | Corrode | Ok | Ok | Ok | Ok | Ok | Ok | Etch | Ok |
GE-8111 | Etch | Etch | Ok | Corrode | Ok | Ok | Slight | Ok | Ok | Ok | Etch | Ok |
GE-8148 | Etch | Etch | Ok | Corrode | Ok | Ok | Ok | Ok | Ok | Ok | Etch | Ok |
金蚀刻剂TFA | Etch | Etch | Ok | Corrode | Slight | Ok | Ok | Ok | Ok | Ok | Etch | Ok |
镍铬蚀刻剂TFC | Etch | Ok | Etch | Etch | Etch | Surf ox | Ok | Ok | Ok | Ok | Etch | Surf ox |
镍铬蚀刻剂TFN | Etch | Ok | Etch | Etch | Etch | Surf ox | Ok | Ok | Ok | Ok | Etch | Surf ox |
镍蚀刻剂TFB | Etch | Ok | Etch | Etch | Etch | Surf ox | Ok | Ok | Ok | Ok | Etch | Surf ox |
镍蚀刻剂TFG | Etch | Ok | Ok | Ok | Etch | Ok | Ok | Ok | Ok | Ok | Ok | Ok |
镍刻剂1型 | Etch | Ok | Slight | Etch | Etch | Ok | Ok | Ok | Slight | Ok | Etch | Ok |
银蚀刻剂TFS | Etch | Etch | Ok | Corrode | Slight | Ok | Ok | Ok | Ok | Ok | Etch | Ok |
氮化钽蚀刻剂Ⅲ | Etch | Ok | Etch | Etch | Etch | Etch | Ok | Etch | Etch | Ok | Etch | Etch |
氮化钽蚀刻剂SIE-8607 | Etch | Ok | Etch | Etch | Etch | Etch | Ok | Etch | Etch | Ok | Etch | Etch |
钛蚀刻剂TFT | Etch | Ok | Etch | Ok | Ok | Ok | Etch | Etch | Etch | Ok | Etch | Ok |
钛蚀刻剂TFTN | Etch | Ok | Etch | Slight | Slight | Ok | Ok | Ok | Etch | Ok | Etch | Ok |
钛-钨TIW-30 | Ok | Ok | Ok | Ok | Slight | Ok | Ok | Ok | Ok | Ok | | Ok |
钨蚀刻剂TFW | Etch | Etch | Etch | Ok | Etch | Slight | Ok | Slight | Ok | Etch | Etch | Ok |
注：Etch=显著蚀刻；Slight=轻微侵蚀；Ok=不侵蚀；Surf ox=表面氧化；Corrode=表面腐蚀
